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Used and Refurbished Scanning Electron Microscopes (SEMs)

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HITACHI  S-806C

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$3,950 AS IS
HITACHI - S-806C:  Wafer Inspection Field Emission SEM. Permits inspection of in-process wafers of up to 6 in. in diameter without coating or beam damage. The inspected wafers may then be returned to the process line. The cold field emission electron source assures quality images at all operating voltages. The sample stage is fully computer controlled for ease of operation and high sample throughput. Resolution: 15 nm at 1 kV. Magnification: 50X - 100,000X. Accelerating Voltage: 0.5 - 15 kV. Sample Size: 6 in. wafer (max.). Sample Stage: X/Y: 150 mm. SOLD AS IS, NO TURBO PUMP.          Inventory#: 36721
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JEOL  JWS-7500E

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$29,000 SOLD AS IS
JEOL - JWS-7500E:  In-Line Wafer Inspection SEM for up to 200 mm Wafers and 0.5 micron Design Rule.          Inventory#: 51317
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JEOL  JWS-7555

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$99,000
JEOL - JWS-7555:  Wafer Inspection SEM. Cassette to robot handling. Magnification to 200,000. Specimen Stage: 4 axis goniometer with 200 mm X-Y travel and tilt -15 to 60 degrees. Field emission electron gun. Date of Mfg.: 1999. CE marked.          Inventory#: 52567
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JEOL  JWS-7555

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$49,000 AS IS
JEOL - JWS-7555:  Wafer Inspection SEM with X-Ray Detector. Resolution: 5 nm. Magnification: 100X to 200,000X. Field emission electron gun. X-Y Stage Travel: 200 mm. $99,000 Refurbished.          Inventory#: 52718
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