Used and Refurbished Photoresist Coating Equipment
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SVG
90 Series
-
$19,000 AS IS
SVG -
90 Series:
UV Coat & Develop Tracks.
Configured for 200 mm wafers. 4 Elevators Model 90211S.
Two track system one side with 3 develop stations and one side with 2 coat stations.
Glass enclosure with HEPA filtered hood, ion system static control, Semifab RAM 3500 environmental control unit and a Donaldson high purity products counter-flow adsorber module.
Two tank chemical cabinet with 4 DI water tanks and pumps.
Stepper interface module.
Top and bottom edge bead removal.
Spatula transfer arms between bake and chill plates.
Backside wash on develop station.
Modules (1)-57185, (2)-9037, (4)-9044, (2)-9026, (1)-9038, (3)-9036, (3)-9032.
SOLD AS IS.
Inventory#:
34337 View
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SPECIALTY COATING SYSTEMS -
DEGEN III:
MAP UV Curing System.
Total of 6 UV lamps.
Track size: 3.5 in. conveyorized track.
Main unit: Intelmatec.
With controller and power supply.
Sold As Is.
Inventory#:
25144 View
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SVG/SITE SERVICES -
8632CTD/8636HPO:
Developer-Exposure Track.
Single track developer configured with 2 elevators, one spinner and one bake.
System has an OAI 0130-042-20 deep UV.
220 nanometer exposure tower capable of up to 2000W.
Currently configured for 4 in. wafers.
Inventory#:
41192 View
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SVG -
8626 PC:
Cassette to Cassette Single Track Photoresist Coater.
Model 8626 PC/8636 HPO programmable controller.
Configuration: Elevator - Spin Coater - Elevator.
System can be configured for wafers up 6 in. dia.
Inventory#:
40115 View
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FAS TECHNOLOGIES -
MicroE™ 200:
Extrusion Coating System.
Uses high precision extrusion technology to coat materials in a wide range of viscosities.
Coats very thick layers (100 micrometers) in a single step. Repeatable digitally programmed process.
Greater material utilization than spin coating (typical 75 percent of dispensed material remains on the wafer).
Inventory#:
42576 View
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FAS TECHNOLOGIES -
MicroE™ 200:
Cassette to Cassette Extrusion Coating System with Stacked Bake/Chill Oven.
System is capable of coatings over 100 micron thick in one process step
with uniformities surpassing +/- 2 percent.
Material utilization is 75 percent compared to 5-10 percent for spin coating.
This means lower cost of material and reduced expense of waste disposal.
Increased process uniformity.
Uses high precision extrusion technology.
Ability to coat materials in a wide range of viscosities.
Repeatable digitally programmed process.
With Genmark Mini Max Gencobot 7S/3L Handler.
Model JS-9940 stacked bake unit with 3 ovens.
Inventory#:
42901 View
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IVI -
BOX COATER:
48 in. Thermal Evaporator.
PC Controller. Sycon STC-200 Deposition Controller.
Inside Pill Shape Dimensions: 48 in. L x 48 in. W x 48 in. H.
Baseplate has 23 - 1 in. feedthroughs, 5 - 1-1/4 in. feedthroughs and 1 - 8 in. port. 6 - 2-1/2 in. ports.
13-1/2 in. port where motor drive comes into top of chamber.
IVI 8930 Model 2205 Resistance Power Supply.
Cryopump with compressor and rough pump.
208V, 3 Ph, 60 Hz.
Inventory#:
43794 View
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UNAXIS -
BAK 1131:
Large Box Coater Evaporation System.
Khan NT controller.
Dual CTI-400 Cryo Pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
System currently configured with inductive evaporation
sources but can be modified to any standard source.
System includes autoload option.
System manufactured in 2001, very clean nice condition.
Inventory#:
47362 View
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BALZERS -
1131:
Large Box Coater Evaporation System.
Khan computer controller. Dual cryo pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
Currently configured with inductive thermal evaporation source.
Can easilty be configured with other types of evaporation sources.
System includes autoload option.
Very Nice Condition.
Inventory#:
47626 View
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BALZERS -
BAK 760:
Dual Source Box Coater.
Resistive thermal source and inductive evaporation source.
IC6000 crystal deposition monitor with a dual crystal head.
Heater controls but no substrate heaters.
Austin Scientific Cryo-Plex 16 cryopump with compressor.
Usable chamber area: 888 mm wide,
923 mm height, and 950 mm deep.
Water cooled chamber walls.
Inventory#:
50204 View
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MTI/S3 -
MULTIFAB:
Photoresist Coating Track System.
Wafer is transferred from elevator to bake and spin coat modules via robotic arm.
All process parameters are programmed on
the system monitor using a light pen.
Inventory#:
51541 View
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MTI -
FLEXIFAB:
Automated Photoresist Coater.
Robot arm transfers wafers between the cassette elevator, the bake module and the spin coat module.
No photoresist pumps.
Stainless steel construction.
Inventory#:
51542 View
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MTI/S3 -
FLEXIFAB:
Photoresist Coating System.
Parts system only. Includes bake, spin, elevator and control units.
Missing some parts. Call for detailed photos.
Inventory#:
51548 View
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TEMESCAL -
BJD-1800:
Box Coater with Eight Thermal Evaporation Sources.
Evaporator with eight resistive filament sources.
Inficon IC4 deposition rate controller.
Inside Chamber Dimensions: 24 in. L x 25 in. W 27-1/2 in. H.
Water cooled chamber with highvac gate valve over sources.
High vacuum cryopump with compressor and roughing pump and Regen control.
Automated vacuum control.
Motor control for substrate rotation. Dual shutter controller.
Inventory#:
55134 View
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THERMO ORIEL -
ACCUDOSE 9000:
Photospeed Tool Measures Batch to Batch Photospeed Variations.
Photoresist testing system. Oriel part 83995 near UV system with fast shutter.
Assures that exposure dosage is in-line with your process window requirements.
No need to sideline your expensive stepper for photoresist testing.
Provides accurate, incremented bulk area exposures across a wafer.
Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.
Inventory#:
53217 View
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ANATECH -
HUMMER VI-A:
Cold Deposition/Etch Sputter Coater with Carbon Accessory.
Cold planar magnetron sputtering.
Microscope stub holder accommodates up to 3.25 in. dia. substrates.
Self contained two stage vacuum pump.
Carbon evaporation accessory.
Does not have deposition monitor, operates on timed mode.
115V, 60 Hz, 6A. No Gold Target.
Inventory#:
55453 View
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CEE -
100:
Precision Spinner.
Fully programmable and user friendly.
Spin Range: 0 to 6,000 rpm.
Acceleration: 0 to 30,000 rpm/sec.
Time: 0 to 999 sec/step with up to 10 steps per program.
Max. Substate Dia.: 200 mm or 6 in. sq.
120V, 60 Hz.
Inventory#:
54813 View
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BALZERS -
BAK 640:
High Vacuum E-Beam Box Coater.
Dual E-Gun system, large single pocket and small 4 pocket.
Diffusion pumped high vacuum system.
Vacuum Chamber Dimensions: 29 in. Widest Point x 32 in. D x 35 in. H.
Includes roughing pump.
$39,000 AS IS.
Inventory#:
54735 View
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EMITECH -
K650X:
Large Sample Sputter Coater.
Triple target sputtering (3 x 80 mm dia.).
No gold targets with system. LCD display of parameters.
Low energy cool system.
Rotating specimen stage: 155 mm dia.
Includes vacuum pump.
Inventory#:
54982 View
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CEE -
100 Developer:
Benchtop Precision Spinner.
Configured for develop process. Fully programmable.
Spin Range: 0 to 6000 rpm. Acceleration: 0 to 30,000 rpm/sec unloaded.
Time: 0 to 999 sec/step. Program Steps: 10 steps/program.
Max. Plate Size: 200 mm round or 6 in. sq., depends on chuck installed.
Has nozzle for backside rinse. No pumps with unit at this price.
115V, 60 Hz, CE.
Inventory#:
55455 View
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HEADWAY RESEARCH/TERRA UNIVERSAL -
PWM32-PS-R790/7018-03-12285-080700:
Stainless Steel Hepa Filtered Hood with Two Photoresist Spinners.
Terra Universal stainless steel hood with overhead Hepa filter, exhaust vents in back of tabletop.
Outside Dimensions: 72-1/2 in. L x 32 in. W x 88 in. H.
Static neutralizing air guns. Two Headway PWM32-PS-R790 spinners.
Up to 10,000 rpm. 7.9 in. ID bowl on spinners for up to 5 in. dia. or diagonal substrates. 120V, 60 Hz, 24A.
Inventory#:
55276 View
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EMITECH -
K550X:
Sputter Coater.
LCD display of parameters.
Single cathode system 60 mm dia.
Specimen Stage: 60 mm dia.
No target with system.
Includes vacuum pump.
Inventory#:
54983 View
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INTERNATIONAL VACUUM -
303030:
E-Beam Box Coater.
AS IS. Not Complete. 4 pocket E-Gun in chamber.
Drum Type Substrate Fixturing: 28 in. dia. x 24 in.
Large Varian diffusion pump.
Inficon IC6000 deposition monitor.
Chamber Inside Dimensions: 30 in. x 30 in. x 30 in.
Inventory#:
53837 View
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SVG/AIO CORPORATION -
8626PC/8636HPO:
Single Track Spin Coater.
86 Series fully automated spin coating track system.
Configuration: Elevator, Elevator, Spin Coater, Bake, Bake, Elevator, Elevator.
Currently configured for 4 in. wafers.
No resist pumps included. 208V, 3 Ph, 60 Hz.
Inventory#:
55381 View
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HEADWAY RESEARCH -
PM80:
Bench with Dual Headway Spinners for Substrate Cleaning.
Spinners for substrate cleaning.
Footswitch controlled. Handles up to 6.5 in. dia. substrate.
Variable Speed: Switch under unit allows selection of speed from 500 to 5000 rpm.
120V, 60 Hz.
Inventory#:
55428 View
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All items are covered by our 30-Day Right of Return and 3-Month Warranty
unless otherwise stated. For full details of this policy,
click here!
Note: All
manufacturers names and models are used for illustrative purposes only.
Any trademarks, tradenames or copyrights remain solely the property of
the manufacturer. Unless otherwise stated, all items are used, and
Bid-Service is not a manufacturer authorized representative. All images
are copyright 2001-2010 Bid-Service LLC/Sci-Quip and may not be used for
any purpose without prior written permission
TEMESCAL -
BJD-1800:
Box Coater with Eight Thermal Evaporation Sources.
Evaporator with eight resistive filament sources.
Inficon IC4 deposition rate controller.
Inside Chamber Dimensions: 24 in. L x 25 in. W 27-1/2 in. H.
Water cooled chamber with highvac gate valve over sources.
High vacuum cryopump with compressor and roughing pump and Regen control.
Automated vacuum control.
Motor control for substrate rotation. Dual shutter controller.
Inventory#:
55134 
