Used and Refurbished High-Vacuum Deposition Systems
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AVIZA PANTHEON
300 ALD
$-
AVIZA PANTHEON -
300 ALD:
Atomic Layer Deposition System.
300mm Nano-ALD System. 3 Chamber, High K-NOLA.
Mfg.: 8/2005. Original Cost: $3,740,000.00.
More information to come contact us for details.
Inventory#:
55442 View
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UNION CARBIDE -
1030:
Parylene Deposition System.
Stainless Bell Jar: 13-3/4 in. dia.
The parylene is vaporized at a high temperature and at a low pressure.
The vapor will deposit directly on any cool surface.
Deposited films follow the contours of the surfaces.
Includes vacuum pump.
Inventory#:
54463 View
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AIXTRON -
AIX200:
LP-MOCVD Chemical Vapor Deposition System.
Production system for sophisticated heterostructures such as GaAs, InP,
GaInAS, GaInAsP laser and multi quantum well structures.
High purity gas blending system.
Excellent homogeneity in film thickness and composition.
Excellent electrical and optical quality of the films.
THIS UNIT SOLD NOT TESTED WITH 30 DAY RIGHT TO RETURN.
Inventory#:
45438 View
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GEMINI -
3:
Dual Chamber Epitaxial Reactor.
Gas Panel: The gas panel is equipped to handle one silicon flow stream and two dopant flow streams. All lines in the gas panel, as well as the lines leading to the reactor, have been cleaned and passivated. All valves have been cleaned, tested, and replaced as needed. All MFC’s have been cleaned and calibrated, however, the MFC’s for the silicon source and HCl have been replaced. The gas panel has passed a leak check test after reassembly.
Controls and Electronics: An updated industrial computer (Advantech) and new control software has been installed. All PLC’s have been checked and replaced as needed. All inputs and outputs, as well as logic, have been tested to work with the PLC’s. All interlocks have been checked.
Pneumatics: All pneumatic lines and fittings have been checked and replaced as needed. This includes the lines going to the gas delivery system. The larger pneumatic lines and fittings going to the system exhaust, vacuum, and bell jar lift have been checked and replaced as needed. The pneumatic regulators have also been checked and replaced as needed.
Water Cooling System: The water cooling lines and fittings have been checked and replaced as needed. The incoming water valves, together with its associated sensors, have been checked, cleaned, and replaced as needed. The entire cooling water system has been checked and is free from flow restrictions, corrosion, and leaks.
Electro-Mechanical: The bell jar lift and clamping mechanism has been checked. The air cooling system and blowers have been checked and replaced as needed. The Hepa filters and pre-filters have been checked and replaced as needed. The reactor door seals and also the susceptor rotation mechanism have been checked.
Process Chamber (1): All quartzware is in working condition, however, there is no warranty on such used quartzware. All O-rings used in the process chambers and feedthroughs have been replaced. All sealing surfaces have been checked for leaks and pitting, and have been re-machined as needed. Each process chamber has been leak checked in nitrogen.
Process Chamber (2): There will be no susceptors (new or used) supplied with the system. The customer is responsible for ordering their own susceptors. No RF Generator.
Inventory#:
50595 View
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PLASMA-THERM -
SLR 730:
Load Locked RIE Reactive Ion Etching System.
Windows graphical user interface provides an easy and familiar environment for machine
operation and control. 12-7/8 in. dia. top electrode. The substrate is temperature controlled by means of an embedded resistance heater.
Temperature range: 80 to 400 deg C.
11 in. dia. substrate carrier.
6 mass flow controllers: CHF3, AR, 02, 02, CF4, AR.
500W, 13.56 MHz RF generator.
Includes pump and blower package.
Inventory#:
50467 View
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ANATECH -
HUMMER VI-A:
Cold Deposition/Etch Sputter Coater with Carbon Accessory.
Cold planar magnetron sputtering.
Microscope stub holder accommodates up to 3.25 in. dia. substrates.
Self contained two stage vacuum pump.
Carbon evaporation accessory.
Does not have deposition monitor, operates on timed mode.
115V, 60 Hz, 6A. No Gold Target.
Inventory#:
55453 View
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INFICON -
XTM/2:
Deposition Monitor.
Controller only, no cables or crystal.
Compact half rack XTM/2.
All operating and programming functions.
Accessible from a single screen.
100/240V, 1 Ph, 50/60 Hz.
Inventory#:
54099 View
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All items are covered by our 30-Day Right of Return and 3-Month Warranty
unless otherwise stated. For full details of this policy,
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AVIZA PANTHEON -
300 ALD:
Atomic Layer Deposition System.
300mm Nano-ALD System. 3 Chamber, High K-NOLA.
Mfg.: 8/2005. Original Cost: $3,740,000.00.
More information to come contact us for details.
Inventory#:
55442 
