Used and Refurbished High-Vacuum Evaporative Deposition Systems
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TEMESCAL
FC-1800
-
$79,000
TEMESCAL -
FC-1800:
E-Beam Evaporator.
Older unit but it will be repainted and reconditioned.
Deposition monitor.
CTI-8 Cryopump with rough pump.
Load lock for loading.
Multipocket gun with power supply and controls.
No substrate holder included.
Inventory#:
39282 View
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UNION CARBIDE -
1030:
Parylene Deposition System.
Stainless Bell Jar: 13-3/4 in. dia.
The parylene is vaporized at a high temperature and at a low pressure.
The vapor will deposit directly on any cool surface.
Deposited films follow the contours of the surfaces.
Includes vacuum pump.
Inventory#:
54463 View
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PLASMATRON -
ELECTRON BEAM EVAPORATOR:
Automatic or manual operation modes.
Four pocket electron gun 18cc crucibles.
Syscan STC-200 deposition rate controller for auto operation.
Automatic Cryo pump regeneration.
Temescal Simba 2 electron gun power supply.
Chamber 20 in. Across x 28 in. High x 20 in. deep.
Variable speed rotation control.
Inventory#:
42592 View
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IVI -
BOX COATER:
48 in. Thermal Evaporator.
PC Controller. Sycon STC-200 Deposition Controller.
Inside Pill Shape Dimensions: 48 in. L x 48 in. W x 48 in. H.
Baseplate has 23 - 1 in. feedthroughs, 5 - 1-1/4 in. feedthroughs and 1 - 8 in. port. 6 - 2-1/2 in. ports.
13-1/2 in. port where motor drive comes into top of chamber.
IVI 8930 Model 2205 Resistance Power Supply.
Cryopump with compressor and rough pump.
208V, 3 Ph, 60 Hz.
Inventory#:
43794 View
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UNAXIS -
BAK EVO (760):
Multiple Source Thermal Evaporator.
Proven modular design box coater system can be easily configured for many applications.
Currently configured with 3 shutters and 8 water cooled power feed throughs.
3 Inficon XTC crystal deposition monitors each controlled via Khan computer.
Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics.
Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built-in failure diagnostics.
CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down.
Mfg. 2001.
Inventory#:
47000 View
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UNAXIS -
BAK 1131:
Large Box Coater Evaporation System.
Khan NT controller.
Dual CTI-400 Cryo Pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
System currently configured with inductive evaporation
sources but can be modified to any standard source.
System includes autoload option.
System manufactured in 2001, very clean nice condition.
Inventory#:
47362 View
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BALZERS -
1131:
Large Box Coater Evaporation System.
Khan computer controller. Dual cryo pumps.
Box Size: 48 in. L x 59 in. at widest point x 63 in. H.
Currently configured with inductive thermal evaporation source.
Can easilty be configured with other types of evaporation sources.
System includes autoload option.
Very Nice Condition.
Inventory#:
47626 View
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BALZERS -
BAK 760:
High Capacity High Vacuum Evaporation System.
Kahn computer controller upgrade.
Currently configured for induction evaporation sources but can be modified to different sources at a cost.
Useable chamber area: 888 mm W, 923 mm H, 950 mm D.
Water cooled chamber walls.
Inventory#:
47652 View
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CHA -
SE-600-RAP:
Multisource Thermal Evaporator.
18 in. dia. quartz bell jar with implosion guard and hoist.
Auto-Tech II automatic valve controller.
CTI CryoPump with compressor and roughing pump. Vacuum gauge.
Deposition control is manual and there is no rate monitor at this price.
Refurbished and repainted.
Inventory#:
48648 View
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BALZERS -
BAK 760:
Dual Source Box Coater.
Resistive thermal source and inductive evaporation source.
IC6000 crystal deposition monitor with a dual crystal head.
Heater controls but no substrate heaters.
Austin Scientific Cryo-Plex 16 cryopump with compressor.
Usable chamber area: 888 mm wide,
923 mm height, and 950 mm deep.
Water cooled chamber walls.
Inventory#:
50204 View
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CHA -
MARK 40 ISS:
Electron Beam Evaporator with Source Isolation Chamber.
Model SR-10 10 kW electron beam power supply with digital readouts.
With the source isolation chamber, substrate loading and unloading is done with the source
chamber remaining in high vac.
Inficon IC5 Deposition Controller for fully automated operation.
CTI cryopump, also includes system roughing pump.
Chamber Size: 26 in. x 26 in. dia.
Ultimate Vacuum: 10^-8 torr.
Quartz substrate heaters. 6 pocket e-gun. Single 24 in. dia. lift-off dome with rotation controls.
Inventory#:
51810 View
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CHA -
MARK 50:
High Throughput E-Beam Evaporator with Large Ion Gun for Etch or Assist. IC6000 deposition rate monitor. Ion Tech 2.5 x 22 ion source.
Triple dome planetary for 4 in. wafers.
Four pocket E-gun.Temescal CV-8 power supply with power and sweep controls. Automatic valve control. Fixture rotation control.
Includes roughing pump. $150,000 Configured with Diffusion Pump.
Inventory#:
53196 View
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POLYMER LABORATORIES -
PL-ELS 1000:
Evaporative Light Scattering Detector.
Concentration detection method for liquid chromatography.
PC controller.
120V, 50/60 Hz.
Inventory#:
53358 View
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BALZERS -
BAK 640:
High Vacuum E-Beam Box Coater.
Dual E-Gun system, large single pocket and small 4 pocket.
Diffusion pumped high vacuum system.
Vacuum Chamber Dimensions: 29 in. Widest Point x 32 in. D x 35 in. H.
Includes roughing pump.
$39,000 AS IS.
Inventory#:
54735 View
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TEMESCAL -
FC-1800:
Load-Locked Electron Beam Evaporator with Dual Guns and Substrate Heaters.
This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump.
4 pocket gun with CV-8, 8 kW power supply and a single pocket gun. Deposition rate monitor.
Bell Jar: 19-1/2 in. ID.
Single substrate dome 17 in. dia. with rotation control.
Includes substrate heaters. Auto valve sequencer.
Inventory#:
53808 View
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INTERNATIONAL VACUUM -
303030:
E-Beam Box Coater. AS IS. Not Complete. 4 pocket E-Gun in chamber. Drum Type Substrate Fixturing: 28 in. dia. x 24 in. Large Varian diffusion pump.
Inficon IC6000 deposition monitor. Chamber ID: 30in. x 30in. x 30in. 31 Photos available.
Inventory#:
53837 View
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CHA -
MARK 50:
High Throughput E-Beam Deposition System.
IC-6000 crystal deposition rate monitor.
4 pocket E-gun with 8 kW power supply and sweep controls. Stainless steel 32 in. dia. x 32 in. D water cooled vacuum chamber. Fully automatic vacuum control. Unique slide down door for easy loading and unloading. Currently configured with triple dome planetary fixturing for 8 in. wafers. Includes roughing pump. Includes CTI On-Board Water Pump. $140,000 with Diffusion Pump.
Inventory#:
54016 View
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CHA -
MARK 50:
High Throughput E-Beam Evaporator.
32 in. x 32 in. water cooled cylindrical chamber simplifies loading and unloading.
4 pocket E-gun with SR-10 power supply and controls.
STC-200 deposition rate controller.
Currently configured to accommodate flip-type fixturing for depositing on both sides of a substrate.
Currently configured with 16 in. diffusion pump and complimented by a second phase CTI water pump to remove water vapor. (Can be upgraded to cyropumped system at additional cost).
Includes roughing pump.
Inventory#:
54047 View
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CHA -
MARK 40 ISS:
E-Beam Evaporator Configured for Lift-Off.
System can run in semiautomatic or manual modes. Inficon IC5 crystal deposition controller with floppy drive for recipe storage.
Can store up to 50 processes and 250 total layers in internal memory. Isolation valve above source to increase pump down speeds. SR-10 e-beam power supply with controls. 6 pocket e-gun. Quartz substrate heaters with digital controls.
Autotech IV vacuum control, automatic or manual operation. Single 24 in. dia. lift-off dome with rotation control. Cryopump with compressor and roughing pump.
Inventory#:
53322 View
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EDWARDS -
E306A:
Compact Thermal Evaporator. Laboratory size self contained thermal evaporator. 12 in. dia. quartz bell jar with implosion shield. Diffusion and roughing pump located in base. Built-in gauges and power supply. 220V., 60Hz.
Inventory#:
54572 View
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