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Used and Refurbished Semiconductor Processing Exposure Systems

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OPTICAL RADIATION CORP  OPTIBEAM 5050

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$1,250 AS IS
OPTICAL RADIATION CORP - OPTIBEAM 5050:  Photoprinter System UV Exposure. For exposure of ultraviolet sensitive materials. Can handle single as well as double-sided exposure. 5000W. lamp. Exposure Area: 24 in. x 30 in. Max. AS IS. 30 DAY ROR.          Inventory#: 36534
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SVG/SITE SERVICES  8632CTD/8636HPO

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$21,500
SVG/SITE SERVICES - 8632CTD/8636HPO:  Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.          Inventory#: 41192
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PANACOL-ELOSOL  UV-D-400

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$2,500 50 Hz ONLY
PANACOL-ELOSOL - UV-D-400:  UV Conveyor System. Fast curing of UV adhesives and potting materials. 220V, 50 Hz.          Inventory#: 49288
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OAI  316

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$1,250
OAI - 316:  UV Exposure Meter. Provides key exposure measurements of energy intensity and time. 120V, 60 Hz.          Inventory#: 49739
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ULTRON  UH 102

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$6,950
ULTRON - UH 102:  UV Curing System. For the curing of UV films. Nitrogen blanket to assure complete curing of the UV adhesives. Microprocessor based programmable controller.          Inventory#: 51496
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OAI  0130-042-20

NEW ARRIVAL!!

$12,500
OAI - 0130-042-20:  2000W Deep UV Exposure Tower with Power Supply. Max. Power Output: 2000W. Wavelength: 220 nm. Sensor: 220/260. Final Lens: 4-7/8 in. dia.          Inventory#: 55317
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ULTRON  UH 102

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$6,950
ULTRON - UH 102:  UV Curing System. For the curing of UV films. Nitrogen blanket to assure complete curing of the UV adhesives. Microprocessor based programmable controller. 115V, 60 Hz, 10A, CE          Inventory#: 52539
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ULTRON  UH 102

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$6,950
ULTRON - UH 102:  UV Curing System. For the curing of UV films. Nitrogen blanket to assure complete curing of the UV adhesives. Microprocessor based programmable controller.          Inventory#: 52970
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THERMO ORIEL  ACCUDOSE 9000

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$19,500
THERMO ORIEL - ACCUDOSE 9000:  Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.          Inventory#: 53217
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OAI  2000-006-02

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$39,000
OAI - 2000-006-02:  Cassette to Cassette UV Flood Exposure System. System includes a UV light source, intensity controlling power supply and robotic substrate handling subsystem. PC controller. 500W NUV Lamp House: 360-440 nm. 5 in. dia. collimated lense. 120V, 50/60 Hz.          Inventory#: 53249
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AB-M  Mask Aligner

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$25,000
AB-M - Mask Aligner:  Mask Aligner and Exposure System. 350W lamp housing with power supply. Final Lens: 6-1/2 in. x 6-1/2 in. Precision alignment stage. Mask Holder: 4 in. x 4 in. with 2-1/8 in. x 2-1/8 in. substrate holder. Exposure timer. Single StereoZoom microscope for alignment, not split field. 120V, 50/60 Hz.          Inventory#: 53380
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OAI  J500/VIS

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$35,000
OAI - J500/VIS:  Deep UV Mask Aligner and Exposure System with Split Field Alignment Optics. High performance high resolution mask aligner. 2000W deep UV light source 220/260 nanometers. 6 in. dia. vacuum chuck. Split Field alignment optics with cameras, monitors and fiber optic illuminators. Exposure timer. Nitrogen flow control. Micrometer control of chuck X, Y, Z and Theta.          Inventory#: 54738
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FUSION  150PC

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$12,000
FUSION - 150PC:  Photoresist Photostabilization System. Fusions rapid, one-step UV/Bake process replaces a standard resist hard bake and allows for higher process margins and increased process consistency. Cassette to cassette handling of wafers up to 150 mm. 208V, 3 Ph, 60 Hz, 21A.          Inventory#: 53613
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ULTRON  UH 102

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$6,950
ULTRON - UH 102:  UV Curing System. For the curing of UV films. Nitrogen blanket to assure complete curing of the UV adhesives. Microprocessor based programmable controller.          Inventory#: 50810
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ORIEL  82440

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$12,500
ORIEL - 82440:  Large Area UV Exposure System. Final Lens: 12 in. dia. Max. Lamp Power: 1000W.Spectral Region: 350 to 450 nm. 220V, 50/60 Hz, 20A.          Inventory#: 53651
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ORIEL  87330

NEW ARRIVAL!!

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ORIEL - 87330:  Exposure System. More information to come contact us for details.          Inventory#: 55528
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OAI  0950-0360-01

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$35,000
OAI - 0950-0360-01:  Cassette to Cassette UV Flood Exposure System. System includes a robotic substrate handling system, UV lamp housing and intensitiy controlling power supply. Lamp housing will support up to 1000W lamp. Configured for 365 to 400 nm. Max. Exposure Area: 6 in. dia. 120V, 60 Hz.          Inventory#: 54130
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ORIEL  87130

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$4,950
ORIEL - 87130:  Exposure Tower with Power Supply. Final Lens: 7 in. dia. Beam Size: 4-1/4 in. x 4-1/4 in. Wavelength: 350 nm to 450 nm. 200W lamp. 110V, 50/60 Hz, 15A. Older system but sold in good working condition.          Inventory#: 55021
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