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Used and Refurbished High-Vacuum Turbo-Molecular Vacuum Pumps

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EDWARDS  EXC 200

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$750
EDWARDS - EXC 200:  Turbo Controller          Inventory#: 14849
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PFEIFFER  TMH 064

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$2,950
PFEIFFER - TMH 064:  Turbo Drag Pump with Controller. Controller does not have user interface, requires external system signal to turn on and off. 63 mm I.D. ISO flange. 120/240V, 50/60 Hz., CE.          Inventory#: 49880
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LEYBOLD  TMP 3500

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$1,500
LEYBOLD - TMP 3500 :  Large Turbo. Bad bearings in turbo. ASA 16 flange.          Inventory#: 41534
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SHIMADZU  E1-2003M1

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$1,000
SHIMADZU - E1-2003M1:  Turbopump Controllers. Controller only, no cables.          Inventory#: 43650
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VEECO  MS-30T

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$8,500
VEECO - MS-30T:  Turbopumped Leak Detector. Full color screen simple operation.1 Button start-up. Fine and gross leak testing. Automatic tuning and calibration. Leak Range: 10 atm cc/sec to 6 x 10^-11 atm cc/sec. 110V, 60 Hz, 25A.          Inventory#: 47992
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PFEIFFER  TMH 1001P

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$11,000
PFEIFFER - TMH 1001P:  Turbo Drag Pump. 8 in. ID ISO flange.CE. Pumping Speed: 880 l/sec. Was rebuilt by manufacturer prior to storage.          Inventory#: 50375
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BALZERS  TPH 2200

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$12,500
BALZERS - TPH 2200:  Large Turbopump with Controller. Requires 24 VDC remote start signal. Side mounted flange: 10 in. ID ISO. High volume flow rate: 2200 l/s. Water cooled. TCP-5000 control unit. 220/240V, 1 Ph, 50/60 Hz.          Inventory#: 51726
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OSAKA VACUUM  TG 1810

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$9,500
OSAKA VACUUM - TG 1810:  Turbopump with Controller. Volume flow rate: 1800 l/s. 10 in. ID ISO flange. 200/220V, 50/60 Hz.          Inventory#: 51816
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MEECO  TURBO 2

NEW ARRIVAL!!

$4,950
MEECO - TURBO 2:  Electrolytic Moisture Analyzer. Measures moisture down to one part per billion range. Provides single digit PPB readings and fast accurate pressure. Selectable alarm points. Menu driven microprocessor control. 120V, 60 Hz.          Inventory#: 55124
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EMCORE  D-180 MOCVD

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$95,000
EMCORE - D-180 MOCVD:  TurboDisc CVD System. Previously used for nitride deposition on 3 in. wafers. Used only 6 gases. Never used magnesium or zinc. Good for electrical or optical component manufacturing.          Inventory#: 52362
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VARIAN  TURBO-V70D

NEW ARRIVAL!!

$1,500
VARIAN - TURBO-V70D:  Turbo Pumping System. Pumping Speed: 60 l/s. 3-3/4 in. OD ISO flange. Controller requires external signal for operation, no front panel control. CE marking.          Inventory#: 55128
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GATAN  600 TMPA

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$10,950
GATAN - 600 TMPA:  Turbopumped DuoMill Dual Station Ion Milling System. Ion milling system for the preparation of high quality TEM specimens. Two independent milling stations mounted on a single high speed vacuum system. Each milling station has a WhisperlokTM specimen exchange system which functions without disturbing the vacuum or milling conditions of the other station and two Octogun ion guns.          Inventory#: 46714
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BALZERS  TPU 510

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$2,950
BALZERS - TPU 510:  Turbopump. Pump only, no cables or controller. Flow Rate: 500 l/s. Inlet Flange: 6 in. ID conflat. Tested in good working condition.          Inventory#: 52916
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EBARA  ET1600WS

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$4,950
EBARA - ET1600WS:  Turbomolecular Pump. Pump only, no cable or controller. Pump Speed: 1600 l/s. 5-Axis control magnetic bearing. Water cooling. Flange Size: 13-3/16 in. OD, 12 holes 12-1/4 in. on center.          Inventory#: 52975
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SEIKO SEIKI  STP 300H

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$3,500
SEIKO SEIKI - STP 300H:  Magnetic Suspension Turbopump. Pump only, no controller or cables. 4 in. ID O-Ring groove flange. Pumping Speed: 300 l/s.          Inventory#: 53100
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LEYBOLD  NT 20

NEW ARRIVAL!!

$950
LEYBOLD - NT 20:  Turbo Controller Electronic Frequency Converter. Turbotronik NT 20 is used to drive the following turbo molecular pumps: Turbovac 150, 360, 150 CSV, 360 CSV, 150V, 360V, 151, 151C, 361, 361C, 600, 600C, 1000, 1000C, 1100C. No cables with unit. 100-240V, 50/60 Hz.          Inventory#: 55161
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LEYBOLD  TURBOVAC 3500C

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$12,000
LEYBOLD - TURBOVAC 3500C:  Large Turbopump with Controller. Pumping Speed: 3600 l/s. ISO Flange: 15-3/4 in. ID, 17-3/4 in. OD. 220V, 1 Ph, 50/60 Hz, 14A.          Inventory#: 53706
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ALCATEL  ATH 1000M

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$12,500
ALCATEL - ATH 1000M:  Maglev Turbomolecular Pump with Controller. Designed for high pressure, high throughput pumping. Flange DN200 ISO-K: 9-1/2 in. OD, 8-3/8 in. ID. Pumping Speed: 850 l/s. 100/120V, 200/240V, 50/60 Hz.          Inventory#: 53846
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PFEIFFER VACUUM  TCP 600

NEW ARRIVAL!!

$950
PFEIFFER VACUUM - TCP 600:  Turbo Pump Controller. Control unit for turbo pumps from TMH/TMU 520 to TMH/TMU 1600. No cables. 110-220V, 50/60 Hz, 15A, CE.          Inventory#: 55419
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SEIKO SEIKI  STP-301

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$8,500
SEIKO SEIKI - STP-301:  Turbomolecular Vacuum Pump with Controller. Oil free, low vibration operation. High reliability. 4 in. ID ISO flange. Pumping Speed: 300 l/s.          Inventory#: 53998
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