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UNAXIS  BAK EVO (760)

Description: 

Multiple Source Thermal Evaporator.
Proven modular design box coater system can be easily configured for many applications.
Currently configured with 3 shutters and 8 water cooled power feed throughs.
3 Inficon XTC crystal deposition monitors each controlled via Khan computer.
Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics.
Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built-in failure diagnostics.
CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down.
Mfg. 2001.

Inventory Number:

47000

Price:

 $165,000 Very Low Hours
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