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ENI
3200 AMT |
Variable Frequency 3000W RF Generator.
Frequency Range: 8 kHz to 111 kHz.
Output Impendance: 50 ohms.
Max. Output Power: 3000W..
$2,950 |
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ENI
5100L-1431 |
Broadband RF Amplifier.
Frequency Range: 1.5 to 400 MHz.
Maximum Output: 100W linear.
230V, 1 Ph, 60 Hz..
$5,950 |
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ENI
5100L-NMR |
NMR Pulse Amplifier.
Pulse amplifier.
Frequency Range: 1.5 to 400 MHz.
Max. Output: 100W.
230V, 60 Hz..
$6,950 |
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ENI
AP400B-M1 |
RF Amplifier.
Frequency range: 80 kHz to 2.7 MHz.
Output power: 400W.
Gain/Flatness: 55 dB/ +/- 1.5 dB.
Air cooled..
$3,950 |
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ENI
DCG-100 |
10 kW DC Plasma Generator.
Requires remote control, no front panel controls.
10K Master configured for up to a 30K system.
Low Z output.
For sputtering difficult materials.
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$2,950 |
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ENI
DCG-100 DC |
Plasma Generator for Reactive Sputtering.
Reactive sputtering power supply.
5 kW master with complete control and monitoring front panel.
Analog interface.
Regulation Modes: Volts, Amps, Watts.
208V, 3 Ph, 50/60 Hz, 40A..
$3,500 |
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ENI
DCG-200Z |
Reactive Sputtering Power Supply.
For reactive sputtering processes in which arcing is unavoidable,
the low level arc energy and high arc sensitivity have important benefits.
System output 20 kW.
380/480V, 3 Ph, 50/60 Hz..
$4,500 |
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ENI
EGR-3200 |
3000W 8 to 111 kHz Power Generator.
Supplies up to 3000W of power over the frequency range of 8 to 111 kHz.
208V, 1 Ph, 60 Hz..
$3,950 |
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ENI
EGR9600B |
Power Generator.
Can supply up to 9000W of power over a frequency range of 8 to 111 kHz.
50 ohm output impedance..
$8,500 |
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ENI
GHW50A-12DF3H0-M1 |
RF Plasma Generator.
RF output of up to 5000W at a frequency of 13.56 MHz. ENI Rev 2, Software version 3.7.
200/208V, 3 P, 50/60 Hz, 38A..
$8,500 |
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ENI
GW5002MA-F1H131-A3 |
Genesis 3000W Water Cooled RF Generator.
Tuned frequency RF Generator.
Frequency Range: 1.8 MHz to 2.17 MHz.
3 kW output. Water cooled. Mfg. 3/97..
$5,250 |
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ENI
LPI-10 |
Linear Pulsed Amplifier.
Frequency Range: 10 - 86 MHz.
Output Power: 1000W.
Gain: 60 dB with gain flatness +/-1 dB..
$7,500 |
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ENI
OEM-50N-11601 |
5000W, 13.56 MHz RF Generator.
Solid state plasma generator.
Operating Frequency: 13.56 MHz.
Rated Power Output: 5000W.
RF Output Impedance: 50 ohms.
Water cooled..
$4,950 |
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ENI
PL-2HF-11451-55 |
Variable Frequency RF Plasma Generator.
Frequency: 90 to 460 KHz.
Rated Output Power: 1400W.
Forced air cooling.
Output Impedance: 50 to 600 ohms..
$2,950 |
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ENI
POLARA-260A |
Pulsed Bipolar Power Supply.
Power: 3 kW. P/N 260-01.
Customer Part No.: 0190-01428.
208V, 3 Ph, 50/60 Hz, 30A, CE..
$3,500 |
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ENI
POLARA-260A |
Pulsed Bipolar Power Supply for Semiconductor Electroplating Applications.
Power: 3 kW.
Software modified Ver. 1.2 Test A.
208V, 3 Ph, 50/60 Hz, 30A..
$3,500 |
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ENI
RFC-2000 |
Controller.
Links Plasma Generators & Matching Networks to Computers for digital metering and control.
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$1,250 |
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ENI
RFC-4T |
Controller.
Links Plasma Generators & Matching Networks to Computers for digital metering and control.
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$1,250 |
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