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Phone: 732-863-9500
FAX: 732-863-1255
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MRC Inventory in Stock:
| Manufacturer/Model |
Description |
Info
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MRC
603 |
3 Target RF/DC Sputtering System with RF Etch and Load Lock Chamber.
System upgraded to PC controller capable of RF or DC sputtering but currently configured with three 4-3/4 in. x 14-7/8 in. DC cathodes.
RF etch platform. 3 gas inputs controlled by MFC, previous gas used: O2, N2, AR. Advanced Energy MDX DC power supply. CTI-8 cryopump with compressor and roughing pump.
RGA available at additional cost..
$49,000 |
View Details and Photo
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MRC
603 |
3 Target RF/DC Sputtering System with RF Etch and Load Lock Chamber.
System upgraded to PC controller capable of RF or DC sputtering
but currently configured with three 4-3/4 in. x 14-7/8 in. DC cathodes.
RF etch platform. 3 gas inputs controlled by MFC, previous gas used: O2, N2, AR.
Advanced Energy MDX DC power supply.
CTI-8 cryo pump with compressor and roughing pump.
RGA available at additional cost..
$49,000 |
View Details and Photo
|
|
MRC
603 |
3 Target RF/DC Sputtering System with RF Etch
and Load Lock Chamber.
System upgraded to PC controller capable of RF or DC sputtering but currently configured with three 4-3/4 in. x 14-7/8 in. DC cathodes. RF etch platform. 3 gas inputs controlled by MFC, previous gas used: O2, N2, AR. Advanced Energy MDX DC power supply. CTI-8 cryopump with compressor and roughing pump. RGA available at additional cost..
$49,000 |
View Details and Photo
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MRC
603-II |
Side Sputtering System w/Etch Capabilities.
Currently configured with 3 D.C. Magnetron Cathodes (inset cathodes).
Alcatel 2033 Roughing Pump. CTI-8 Cryopump. 1500W RF Generator.
Automatic or manual controls for vacuum system and sputtering process.
4 process gas capability.
Average cycle time: 13.0 minutes.
Typical target utilization: Ti-W Inset 35 percent, Al Inset 50 percent.
Cathode size: 4-3/4 in. x 14-7/8 in.
Sputter etch: 1.5 kW RF.
CRT screen monitoring, keyboard parameter control, full automation.
With manuals. 208V, 60 Hz, 3 Ph, 110A..
$69,000 |
View Details and Photo
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