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Phone: 732-863-9500
FAX: 732-863-1255
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SVG
Inventory in Stock:
| Manufacturer/Model |
Description |
Info
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SVG
90 Series |
Photoresist Coat and Develop Track. Configured for 8 in. wafers. Vapor prime capability. Dual Track System: Track 1: 3 coat module, 2 vacuum bake, 1 chill. Track 2: 2 develop, 3 vacuum bake, 3 chill. 2 elevators, steppers interface module. Edge bead removal. Pump cabinet. $19,000 AS IS with 60 day right to return..
$65,000 FULLY TESTED |
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SVG
90 Series |
UV Coat & Develop Tracks. Configured for 200 mm wafers. 4 Elevators Model 90211S. Two track system one side with 3 develop stations and one side with 2 coat stations. Glass enclosure with HEPA filtered hood, ion system static control, Semifab RAM 3500 environmental control unit and a Donaldson high purity products counter-flow adsorber module. Two tank chemical cabinet with 4 DI water tanks and pumps. Stepper interface module. Top and bottom edge bead removal. Spatula transfer arms between bake and chill plates. Backside wash on develop station. Modules (1)-57185, (2)-9037, (4)-9044, (2)-9026, (1)-9038, (3)-9036, (3)-9032. SOLD AS IS..
$19,000 AS IS |
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SVG
Brush Cleaner |
Double sided brush cleaner with some missing parts. Parts Machine. Call for more photos..
$3,950 |
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