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FAX: 732-863-1255
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Inventory in Stock:
| Manufacturer/Model |
Description |
Info
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8626 PC |
Cassette to Cassette Single Track Photoresist Coater.
Model 8626 PC/8636 HPO programmable controller.
Configuration: Elevator - Spin Coater - Elevator.
System can be configured for wafers up 6 in. dia..
$12,500 |
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8636 HPO/8632/8636 HPO |
Three Track Positive Developer.
Designed to provide high volume positive developing of wafers. The machine can be set-up to handle wafers from 3 to 6 in. Currently configured for 6 in. wafers.
Automatic cassette wafer handling with load and unload stations.
Configuration: Send Elevator, Bake Station, Cool, Spin Develop, Bake, Receive Elevator. All three tracks are the same..
$29,000 |
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8636HPO/8632 CTD-DD/8636HPO |
3 Track Developer.
Missing one elevator and one spinner. Tracks Configured: Elevator, Hot, Chill, Develop, Hot, Elevator.
Last used for 4 in. wafers. Good cosmetic condition.
AS IS with 30 Days..
$12,000 AS IS |
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90 |
Photoresist Coat and Develop Track.
Configured for 8 in. wafers.
Vapor prime capability.
Dual Track System: Track 1: 3 coat module, 2 vacuum bake, 1 chill.
Track 2: 2 develop, 3 vacuum bake, 3 chill.
2 elevators, steppers interface module.
Edge bead removal. Pump cabinet.
$19,000 AS IS with 60 day right to return..
$65,000 FULLY TESTED |
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Double Sided Brush Cleaner |
Cassette to cassette wafer cleaning track.
Load cassette keeps wafer wet while awaiting cleaning process.
2 separate double sided brush cleaning stations.
Spin rinsing station before final cassette elevator.
Can be configured for up to 150 mm wafers..
$19,000 |
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Series 90 |
UV Coat & Develop Tracks.
Configured for 200 mm wafers. 4 Elevators Model 90211S.
Two track system one side with 3 develop stations and one side with 2 coat stations.
Glass enclosure with HEPA filtered hood, ion system static control, Semifab RAM 3500 environmental control unit and a Donaldson high purity products counter-flow adsorber module.
Two tank chemical cabinet with 4 DI water tanks and pumps.
Stepper interface module.
Top and bottom edge bead removal.
Spatula transfer arms between bake and chill plates.
Backside wash on develop station.
Modules (1)-57185, (2)-9037, (4)-9044, (2)-9026, (1)-9038, (3)-9036, (3)-9032.
SOLD AS IS..
$19,000 AS IS |
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