|
Phone: 732-863-9500
FAX: 732-863-1255
Email:
Sales |
|
Have equipment
sitting idle?
We're always
in the market for quality high-tech equipment!
Click Here! |
| |
SVG
Inventory in Stock:
| Manufacturer/Model |
Description |
Info
|
|
|
SVG
8626 PC |
Cassette to Cassette Single Track Photoresist Coater.
Model 8626 PC/8636 HPO programmable controller.
Configuration: Elevator - Spin Coater - Elevator.
System can be configured for wafers up 6 in. dia..
$8,500 |
View Details and Photo
|
|
SVG
90 Series |
Photoresist Coat and Develop Track.
Configured for 8 in. wafers.
Vapor prime capability.
Dual Track System: Track 1: 3 coat module, 2 vacuum bake, 1 chill.
Track 2: 2 develop, 3 vacuum bake, 3 chill.
2 elevators, steppers interface module.
Edge bead removal. Pump cabinet.
$19,000 AS IS with 60 day right to return..
$65,000 FULLY TESTED |
View Details and Photo
|
|
SVG
90 Series |
UV Coat & Develop Tracks.
Configured for 200 mm wafers. 4 Elevators Model 90211S.
Two track system one side with 3 develop stations and one side with 2 coat stations.
Glass enclosure with HEPA filtered hood, ion system static control, Semifab RAM 3500 environmental control unit and a Donaldson high purity products counter-flow adsorber module.
Two tank chemical cabinet with 4 DI water tanks and pumps.
Stepper interface module.
Top and bottom edge bead removal.
Spatula transfer arms between bake and chill plates.
Backside wash on develop station.
Modules (1)-57185, (2)-9037, (4)-9044, (2)-9026, (1)-9038, (3)-9036, (3)-9032.
SOLD AS IS..
$19,000 AS IS |
View Details and Photo
|
|
SVG
Double Sided Brush Cleaner |
Cassette to cassette wafer cleaning track.
Load cassette keeps wafer wet while awaiting cleaning process.
2 separate double sided brush cleaning stations.
Spin rinsing station before final cassette elevator.
Can be configured for up to 150 mm wafers..
$19,000 |
View Details and Photo
|
|
