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Inventory in Stock:
| Manufacturer/Model |
Description |
Info
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SVG
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Double Sided Brush Cleaner.
1. Double sided brush with sprayer.
2. Double sided brush with sprayer.
3. Spin rinse with blowoff.
Configured for 8 in. and 6 in. wafers.
3 stations. Cassette to cassette operation.
Easy change over from 8 in. to 6 in. substrates.
Can process standard or transparent substrates.
Refurbished and Ready To Ship..
$27,500 |
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SVG
18DWC |
Double Sided Wafer Cleaner.
Processes wafers through 2 dual sided scrub stations and 1 rinsing and spin dry unit.
Can be configured for wafers up to 5 in. diameter. Currently 4 in.
Cassette to cassette operation.
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$12,500 VERY NICE CONDITION |
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SVG
8020SSC |
Single Sided Cleaner.
Designed for high volume wafer cleaning.
Cassette to cassette operation.
Can be set up to handle wafers from 2 to 5 in.
The machine uses high pressure water for cleaning..
$6,500 |
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SVG
8020SSC/8030IR |
Dual Track Single Sided Wafer Cleaner with IR Tunnel.
Can handle wafers from 3 to 5 in.
Single sided nylon brush cleaning.
(3) solvent/DI dispense nozzles (1) nitrogen blow off.
208V, 60 Hz..
$1,000 AS IS |
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SVG
8626 PC |
Cassette to Cassette Single Track Photoresist Coater.
Model 8626 PC/8636 HPO programmable controller.
Configuration: Elevator - Spin Coater - Elevator.
System can be configured for wafers up 6 in. dia..
$12,500 |
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SVG
8636 HPO/8632/8636 HPO |
Three Track Positive Developer.
Designed to provide high volume positive developing of wafers. The machine can be set-up to handle wafers from 3 to 6 in. Currently configured for 6 in. wafers.
Automatic cassette wafer handling with load and unload stations.
Configuration: Send Elevator, Bake Station, Cool, Spin Develop, Bake, Receive Elevator. All three tracks are the same..
$39,000 |
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SVG
8636HPO/8632 CTD-DD/8636HPO |
3 Track Developer.
Missing one elevator and one spinner. Tracks Configured: Elevator, Hot, Chill, Develop, Hot, Elevator.
Last used for 4 in. wafers. Good cosmetic condition.
AS IS with 30 Days..
$12,000 AS IS |
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SVG
8638VP/8626PC/8636HPO/8638VP |
Coating Track for 4 in. Wafers.
Horseshoe configuration - elevator, vapor prime, chill, elevator/passthrough, u-turn, elevator/passthrough, spin coat, vapor prime, chill, elevator..
$12,500 |
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SVG
90 |
Photoresist Coat and Develop Track.
Configured for 8 in. wafers.
Vapor prime capability.
Dual Track System: Track 1: 3 coat module, 2 vacuum bake, 1 chill.
Track 2: 2 develop, 3 vacuum bake, 3 chill.
2 elevators, steppers interface module.
Edge bead removal. Pump cabinet.
$39,000 AS IS with 60 day right to return..
$85,000 FULLY TESTED |
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SVG
Series 90 |
UV Coat & Develop Tracks.
Configured for 200 mm wafers. 4 Elevators Model 90211S.
Two track system one side with 3 develop stations and one side with 2 coat stations.
Glass enclosure with HEPA filtered hood, ion system static control, Semifab RAM 3500 environmental control unit and a Donaldson high purity products counter-flow adsorber module.
Two tank chemical cabinet with 4 DI water tanks and pumps.
Stepper interface module.
Top and bottom edge bead removal.
Spatula transfer arms between bake and chill plates.
Backside wash on develop station.
Modules (1)-57185, (2)-9037, (4)-9044, (2)-9026, (1)-9038, (3)-9036, (3)-9032.
SOLD AS IS..
$39,000 AS IS |
View Details and Photo
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