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SEMITOOL  EQ22PR Equinox Single Wafer Cassette to Cassette Stripper. Previous Use: Ti etchant and Au deplate. Cassette to cassette operation. Dual end-effector robot quickly and cleanly transfers substrates from chamber to chamber. 2 individual process chambers.. $25,000 View Details and Photo
SEMITOOL  EQP222SR Equinox Single Wafer Cassette to Cassette Solvent Tool. Stainless steel solvent tool. Single end effector robot. 2 process chambers. Date of Mfg.: 1996. 208v, 3 Ph, 50/60 Hz.. $25,000 View Details and Photo
SEMITOOL  SAT 4060D Spray Acid Tool. Previously used with BOE/Glycol. Configured for 6 in. wafers, wafer size can be changed by replacing rotors. Four heated tanks and bulk fill capability. DI water and N2 for cleaning. Graphical display with membrane data entry keypad, 3-1/2 in. floppy drive, multi-recipe.. $39,000 View Details and Photo
SEMITOOL  SAT 4060D-4P-FF72 Two Chamber Spray Acid Tool. Dry to dry dual processing system, fully programmable. Previously used with HF and BOE/Glycol. One chamber currently configured for 5 in. wafers, the other configured for 6 in. wafers. Wafer size can be changed by replacing rotors. Four tank system. DI water rinse and N2 dry.. $39,000 View Details and Photo

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